# US 2026/0076145 A1 · Carrier storage apparatus, substrate processing apparatus, and carrier transfer method > Agents: this data is available as JSON from the patentgrep API and MCP server — see https://patentgrep.com/llms.txt - Number: US 2026/0076145 A1 - Document ID: US20260076145A1 - Status: Published application - Kind: A1 - Application number: 19/252,312 - Filed: 2025-06-27 - Published: 2026-03-12 - Earliest claimed: 2024-07-04 - Assignees: Tokyo Electron Limited - Applicants: Tokyo Electron Limited - Inventors: Junichi SATO; Tatsuya HANAKI; Eiki FUJII - Web page: https://patentgrep.com/patent/US20260076145A1 ## CPC - H10P 72/3404: {Storage means} - B25J 11/0095: {Manipulators transporting wafers} - B65G 1/06: with means for presenting articles for removal at predetermined position or level (B65G1/12 takes precedence) - H10P 72/7602: {the wafers being placed on a robot blade or gripped by a gripper for conveyance} - B65G 2201/0297: Wafer cassette - H10P: GENERIC PROCESSES OR APPARATUS FOR THE MANUFACTURE OR TREATMENT OF DEVICES COVERED BY CLASS H10 - B25J: MANIPULATORS; CHAMBERS PROVIDED WITH MANIPULATION DEVICES ({manipulators specially adapted for use in surgery A61B34/70; manipulators used in cleaning hollow articles B08B9/04}; manipulators associated with rolling mills B21B39/20; manipulators associated with forging machines B21J13/10; {manipulators associated with picking-up and placing mechanisms B23P19/007}; means for holding wheels or parts thereof B60B30/00; {vehicles with ground-engaging propulsion means, e.g. walking members B62D57/02, B62D57/032; devices for picking-up and depositing articles or materials between conveyors B65G47/90, B65G47/91; manipulators with gripping or holding means for transferring packages B65H67/065}; cranes B66C; {manipulators used in the protection or supervision of pipe-line installations F17D5/00; walking equipment adapted for nuclear steam-generators F22B37/006}; manipulators specially adapted for, or associated with, nuclear reactors G21C; {apparatus used for handling wafers during manufacture or treatment of semiconductor H10P72/50}) - B65G: TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS (packaging B65B; handling thin or filamentary materials, e.g. paper sheets or thread, B65H; cranes B66C; portable mobile or lifting or hauling appliances, e.g. hoists, B66D; devices for lifting or lowering goods for loading or unloading purposes, e.g. fork-lift trucks, B66F9/00; emptying bottles, jars, casks, barrels or similar containers, not otherwise provided for, B67C9/00; delivering or transferring liquids B67D; filling or discharging vessels for liquefied, solidified or compressed gases F17C; pipe-line systems for fluids F17D) ## Abstract A carrier storage apparatus includes: a transfer mechanism; a first storage shelf group provided closer to a negative side of a first horizontal axis than the transfer mechanism, and including first storage shelves; a second storage shelf group provided closer to a positive side of the first horizontal axis than the transfer mechanism, and including second storage shelves; and a third storage shelf group provided closer to a positive or negative side of a second horizontal axis than the transfer mechanism, and including third storage shelves, wherein the second storage shelves are arranged in two or more columns along the second horizontal axis and in two or more stages along a vertical axis, wherein the third storage shelves are arranged in two or more stages along the vertical axis, and wherein the transfer mechanism is configured to transfer a carrier to the first to third storage shelves. ## Claims ### Claim 1 A carrier storage apparatus that stores a carrier accommodating a plurality of substrates, comprising: a transfer mechanism configured to transfer the carrier; a first storage shelf group provided closer to a negative side of a first horizontal axis than the transfer mechanism; a second storage shelf group provided closer to a positive side of the first horizontal axis than the transfer mechanism; and a third storage shelf group provided closer to a positive side or a negative side of a second horizontal axis, which is perpendicular to the first horizontal axis, than the transfer mechanism, wherein the first storage shelf group includes a plurality of first storage shelves configured to store the carrier, wherein the second storage shelf group includes a plurality of second storage shelves configured to store the carrier, wherein the third storage shelf group includes a plurality of third storage shelves configured to store the carrier, wherein the plurality of second storage shelves are disposed to be arranged in two or more columns along the second horizontal axis and in two or more stages along a vertical axis, wherein the plurality of third storage shelves are disposed to be arranged in two or more stages along the vertical axis, and each of the plurality of third storage shelves is movable along the vertical axis, and wherein the transfer mechanism is configured to transfer the carrier to the plurality of first storage shelves, the plurality of second storage shelves, and the plurality of third storage shelves. ### Claim 2 (depends on 1) The carrier storage apparatus of claim 1, wherein the transfer mechanism includes: an arm configured to extend and contract along the first horizontal axis and the second horizontal axis; a hand connected to a tip end of the arm and configured to hold the carrier; and a lifting mechanism connected to a base end of the arm and configured to move the arm along the vertical axis. ### Claim 3 (depends on 2) The carrier storage apparatus of claim 2, wherein each of the plurality of third storage shelves holds a bottom plate of the carrier from below. ### Claim 4 (depends on 1) The carrier storage apparatus of claim 1, wherein the transfer mechanism includes: a first arm configured to extend and contract along the second horizontal axis; a second arm connected to a tip end of the first arm and configured to extend and contract along the first horizontal axis; a hand connected to a tip end of the second arm and configured to hold the carrier; and a lifting mechanism connected to a base end of the first arm and configured to move the first arm along the vertical axis. ### Claim 5 (depends on 1) The carrier storage apparatus of claim 1, wherein each of the plurality of third storage shelves holds a bottom plate of the carrier from below. ### Claim 6 (depends on 1) The carrier storage apparatus of claim 1, wherein each of the plurality of third storage shelves holds a flange provided in a ceiling plate of the carrier. ### Claim 7 A substrate processing apparatus, comprising: a carrier storage apparatus configured to store a carrier accommodating a plurality of substrates; and a batch processor provided closer to a positive side of a first horizontal axis than the carrier storage apparatus, and configured to collectively perform processing for the plurality of substrates, wherein the carrier storage apparatus comprises: a transfer mechanism configured to transfer the carrier; a first storage shelf group provided closer to a negative side of the first horizontal axis than the transfer mechanism; a second storage shelf group provided closer to the positive side of the first horizontal axis than the transfer mechanism; and a third storage shelf group provided closer to a positive side or a negative side of a second horizontal axis, which is perpendicular to the first horizontal axis, than the transfer mechanism, wherein the first storage shelf group includes a plurality of first storage shelves configured to store the carrier, wherein the second storage shelf group includes a plurality of second storage shelves configured to store the carrier, wherein the third storage shelf group includes a plurality of third storage shelves configured to store the carrier, wherein the plurality of second storage shelves are disposed to be arranged in two or more columns along the second horizontal axis and in two or more stages along a vertical axis, wherein the plurality of third storage shelves are disposed to be arranged in two or more stages along the vertical axis, and each of the plurality of third storage shelves is movable along the vertical axis, and wherein the transfer mechanism is configured to transfer the carrier to the plurality of first storage shelves, the plurality of second storage shelves, and the plurality of third storage shelves. ### Claim 8 A carrier transfer method of transferring a carrier, which accommodates a plurality of substrates, in a carrier storage apparatus that stores the carrier, wherein the carrier storage apparatus comprises: a transfer mechanism configured to transfer the carrier; a first storage shelf group provided closer to a negative side of a first horizontal axis than the transfer mechanism; a second storage shelf group provided closer to a positive side of the first horizontal axis than the transfer mechanism; and a third storage shelf group provided closer to a positive side or a negative side of a second horizontal axis, which is perpendicular to the first horizontal axis, than the transfer mechanism, wherein the first storage shelf group includes a plurality of first storage shelves configured to store the carrier, wherein the second storage shelf group includes a plurality of second storage shelves configured to store the carrier, wherein the third storage shelf group includes a plurality of third storage shelves configured to store the carrier, wherein the plurality of second storage shelves are disposed to be arranged in two or more columns along the second horizontal axis and in two or more stages along a vertical axis, wherein the plurality of third storage shelves are disposed to be arranged in two or more stages along the vertical axis, and wherein the carrier transfer method comprises: moving the plurality of third storage shelves along the vertical axis; and transferring, by the transfer mechanism, the carrier to the plurality of first storage shelves, the plurality of second storage shelves, and the plurality of third storage shelves.