# US 2026/0076141 A1 · Scheduling substrate processing over multiple processing chambers > Agents: this data is available as JSON from the patentgrep API and MCP server — see https://patentgrep.com/llms.txt - Number: US 2026/0076141 A1 - Document ID: US20260076141A1 - Status: Published application - Kind: A1 - Application number: 19/180,899 - Filed: 2025-04-16 - Published: 2026-03-12 - Earliest claimed: 2024-09-09 - Assignees: Applied Materials, Inc. - Applicants: Applied Materials, Inc. - Inventors: Rony David Mathew; Andreas Neuber; Wei Wang - Web page: https://patentgrep.com/patent/US20260076141A1 ## CPC - H10P 72/0612: {Production flow monitoring, e.g. for increasing throughput} - H10P: GENERIC PROCESSES OR APPARATUS FOR THE MANUFACTURE OR TREATMENT OF DEVICES COVERED BY CLASS H10 ## Abstract Technologies related to production scheduling within semiconductor fabrication plant(s) are described. Processing chambers may receive requests to complete a workload over a period of time. The workload may be scheduled across the processing chambers to maximize an aggregate time that the processing chambers are in a sleep mode. ## Claims ### Claim 1 A method comprising: receiving one or more requests to fabricate substrates, the one or more requests corresponding to a workload over a first period of time; and scheduling the workload across a plurality of processing chambers over the first period of time to maximize an aggregate time that the plurality of processing chambers are in a sleep mode by distributing, over the first period of time, the workload across the plurality of processing chambers such that the sleep mode is maximized for a first subset of the plurality of processing chambers and a production mode is maximized for a second subset of the plurality of processing chambers, wherein the sleep mode corresponds to a lower energy consumption than the production mode. ### Claim 2 (depends on 1) The method of claim 1, further comprising: determining, based on the workload, that the plurality of processing chambers are under-utilized over the first period of time. ### Claim 3 (depends on 2) The method of claim 2, wherein determining that the plurality of processing chambers are under-utilized comprises: comparing an aggregated utilization capacity of the plurality of processing chambers to a utilization rate of the workload and a minimum cycle duration of the sleep mode. ### Claim 4 (depends on 1) The method of claim 1, further comprising: determining a priority list corresponding to the plurality of processing chambers such that, over a second period of time comprising the first period of time, each of the plurality of processing chambers processes approximately a same number of substrates. ### Claim 5 (depends on 4) The method of claim 4, wherein the priority list is based on an amount of time each of the plurality of processing chambers is in sleep mode within the second period of time. ### Claim 6 (depends on 4) The method of claim 4, wherein the priority list is based on a previous priority list corresponding to a second period of time preceding the first period of time. ### Claim 7 (depends on 1) The method of claim 1, wherein a first processing chamber of the plurality of processing chambers is connected to a first mainframe and a second processing chamber of the plurality of processing chambers is connected to a second mainframe that is different from the first mainframe. ### Claim 8 A device comprising: one or more processors; and a memory storing instructions that, upon being executed by the one or more processors, configure the device to: receive one or more requests to fabricate substrates, the one or more requests corresponding to a workload over a first period of time; and schedule the workload across a plurality of processing chambers over the first period of time to maximize an aggregate time that the plurality of processing chambers are in a sleep mode by distributing, over the first period of time, the workload across the plurality of processing chambers such that the sleep mode is maximized for a first subset of the plurality of processing chambers and a production mode is maximized for a second subset of the plurality of processing chambers, wherein the sleep mode corresponds to a lower energy consumption than the production mode. ### Claim 9 (depends on 8) The device of claim 8, wherein the instructions further configure the device to: determine, based on the workload, that the plurality of processing chambers are under-utilized over the first period of time. ### Claim 10 (depends on 9) The device of claim 9, wherein to determine that the plurality of processing chambers are under-utilized, the instructions configure the device to: compare an aggregated utilization capacity of the plurality of processing chambers to a utilization rate of the workload and a minimum cycle duration of the sleep mode. ### Claim 11 (depends on 8) The device of claim 8, wherein the instructions further configure the device to: determine a priority list corresponding to the plurality of processing chambers such that, over a second period of time comprising the first period of time, each of the plurality of processing chambers processes approximately a same number of substrates. ### Claim 12 (depends on 11) The device of claim 11, wherein the priority list is based on an amount of time each of the plurality of processing chambers is in sleep mode within the second period of time. ### Claim 13 (depends on 11) The device of claim 11, wherein the priority list is based on a previous priority list corresponding to a second period of time preceding the first period of time. ### Claim 14 (depends on 8) The device of claim 8, wherein a first processing chamber of the plurality of processing chambers is connected to a first mainframe and a second processing chamber of the plurality of processing chambers is connected to a second mainframe that is different from the first mainframe. ### Claim 15 A system comprising: a plurality of processing chambers; and one or more devices communicatively coupled to the plurality of processing chambers, wherein the one or more devices are to: receive one or more requests to fabricate substrates, the one or more requests corresponding to a workload over a first period of time; and schedule the workload across the plurality of processing chambers over the first period of time to maximize an aggregate time that the plurality of processing chambers are in a sleep mode by distributing, over the first period of time, the workload across the plurality of processing chambers such that the sleep mode is maximized for a first subset of the plurality of processing chambers and a production mode is maximized for a second subset of the plurality of processing chambers, wherein the sleep mode corresponds to a lower energy consumption than the production mode. ### Claim 16 (depends on 15) The system of claim 15, wherein the one or more devices are further to: determine, based on the workload, that the plurality of processing chambers are under-utilized over the first period of time. ### Claim 17 (depends on 16) The system of claim 16, wherein to determine that the plurality of processing chambers are under-utilized, the one or more devices are to: compare an aggregated utilization capacity of the plurality of processing chambers to a utilization rate of the workload and a minimum cycle duration of the sleep mode. ### Claim 18 (depends on 15) The system of claim 15, wherein the one or more devices are further to: determine a priority list corresponding to the plurality of processing chambers such that, over a second period of time comprising the first period of time, each of the plurality of processing chambers processes approximately a same number of substrates. ### Claim 19 (depends on 18) The system of claim 18, wherein the priority list is based on an amount of time each of the plurality of processing chambers is in sleep mode within the second period of time. ### Claim 20 (depends on 15) The system of claim 15, wherein a first processing chamber of the plurality of processing chambers is connected to a first mainframe and a second processing chamber of the plurality of processing chambers is connected to a second mainframe that is different from the first mainframe.