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US 2026/0076133 A1Published application
Substrate processing apparatus and substrate processing method
AssigneeSCREEN Holdings Co., Ltd.
InventorTakashi IZUTA
Life of this patent
Estimating the term…
Abstract
Provided is a substrate processing apparatus that makes it possible to prevent or reduce a problem caused by mixing of a processing liquid for processing a substrate and a processing liquid for cleaning a filter. A substrate processing apparatus (100) includes: a circulation pipe (21) that includes a part branching into two pipes, which are a first branch pipe and a second branch pipe; a filter (53) that filters a first processing liquid and that is provided to at least the first branch pipe; and a controller (73) that carries out a first cleaning process in which a second processing liquid is allowed to flow into the first branch pipe in a backward direction, and then a third processing liquid is allowed to flow into the first branch pipe in the backward direction.
Claims15
A substrate processing apparatus comprising:
- a substrate process tank that uses a liquid containing a first processing liquid to process a substrate;
- a circulation pipe that has both ends connected to the substrate process tank and that includes a part branching into two pipes, which are a first branch pipe and a second branch pipe;
- a filter that filters the first processing liquid;
- a second processing liquid supply section that supplies a second processing liquid containing a component different from a component of the first processing liquid;
- a third processing liquid supply section that supplies a third processing liquid containing a component different from the component of the second processing liquid;
- a discharge section that discharges a liquid containing at least the first processing liquid or the second processing liquid;
- a controller;
- a first switching section that switches whether to allow the first processing liquid to flow into the first branch pipe or the second branch pipe;
- and
- a second switching section that switches whether to allow the second processing liquid to flow into the first branch pipe or the second branch pipe and whether to allow the third processing liquid to flow into the first branch pipe or the second branch pipe,
- the filter being provided to at least the first branch pipe, and
- the controller (1) carrying out a first cleaning process in which, during a period in which the first switching section is controlled so as to allow the first processing liquid to flow into the second branch pipe in a forward direction, the second switching section is controlled so as to (i) allow the second processing liquid to flow into the first branch pipe in a backward direction and (ii) discharge, from the discharge section, the liquid containing at least the first processing liquid, and then the second switching section is further controlled so as to (iii) allow the third processing liquid to flow into the first branch pipe in the backward direction and (iv) discharge, from the discharge section, the liquid containing at least the second processing liquid, and (2) after the first cleaning process, allowing the first processing liquid to flow into the first branch pipe in the forward direction, and allowing the second processing liquid and the third processing liquid to flow into the second branch pipe in the backward direction, or stopping supply of the second processing liquid and the third processing liquid.
9 more elements
A substrate processing method carried out in a substrate processing apparatus including:
- a substrate process tank that uses a liquid containing a first processing liquid to process a substrate;
- a circulation pipe that has both ends connected to the substrate process tank and that includes a part branching into two pipes, which are a first branch pipe and a second branch pipe;
- a filter that filters the first processing liquid;
- a second processing liquid supply section that supplies a second processing liquid containing a component different from a component of the first processing liquid;
- a third processing liquid supply section that supplies a third processing liquid containing a component different from the component of the second processing liquid;
- a discharge section that discharges a liquid containing at least the first processing liquid or the second processing liquid;
- a first switching section that switches whether to allow the first processing liquid to flow into the first branch pipe or the second branch pipe;
- and
- a second switching section that switches whether to allow the second processing liquid to flow into the first branch pipe or the second branch pipe and whether to allow the third processing liquid to flow into the first branch pipe or the second branch pipe, wherein
- the filter is provided to at least the first branch pipe,
- (1) a first cleaning process is carried out in which, during a period in which the first switching section is controlled so as to allow the first processing liquid to flow into the second branch pipe in a forward direction, the second switching section is controlled so as to (i) allow the second processing liquid to flow into the first branch pipe in a backward direction and (ii) discharge, from the discharge section, the liquid containing at least the first processing liquid, and then the second switching section is further controlled so as to (iii) allow the third processing liquid to flow into the first branch pipe in the backward direction and (iv) discharge, from the discharge section, the liquid containing at least the second processing liquid, and
- (2) after the first cleaning process, the first processing liquid is allowed to flow into the first branch pipe in the forward direction, and the second processing liquid and the third processing liquid are allowed to flow into the second branch pipe in the backward direction, or supply of the second processing liquid and the third processing liquid is stopped.
9 more elements
A substrate processing method comprising:
- a substrate processing step of using a liquid containing a first processing liquid to process a substrate in a substrate process tank;
- a circulation processing step of using a filter provided to at least a first branch pipe of a circulation pipe to filter the first processing liquid which flows in the circulation pipe in a forward direction, the circulation pipe having both ends connected to the substrate process tank, and including a part branching into two pipes, which are the first branch pipe and a second branch pipe;
- and
- a processing resumption step of (I) carrying out a first cleaning process in which, during a period in which a first switching section that switches whether to allow the first processing liquid to flow into the first branch pipe or the second branch pipe is controlled so as to allow the first processing liquid to flow into the second branch pipe in a forward direction, a second switching section that switches whether to allow a second processing liquid containing a component different from a component of the first processing liquid to flow into the first branch pipe or the second branch pipe and whether to allow a third processing liquid containing a component different from the component of the second processing liquid to flow into the first branch pipe or the second branch pipe is controlled so as to (i) allow the second processing liquid to flow into the first branch pipe in a backward direction and (ii) discharge, from a discharge section that discharges a liquid containing at least the first processing liquid or the second processing liquid, the liquid containing at least the first processing liquid, and then the second switching section is further controlled so as to (iii) allow the third processing liquid to flow into the first branch pipe in the backward direction and (iv) discharge, from the discharge section, the liquid containing at least the second processing liquid, and (II) after the first cleaning process, resuming circulation of the first processing liquid in the first branch pipe.
1 more element
Dependencies are inferred from the claim text.