Semiconductor device including semiconductor device elements in a semiconductor body

Abstract

A semiconductor device includes: a semiconductor body having a first surface and a second surface; a plurality of semiconductor device elements in the semiconductor body at the first surface; a wiring area over the first surface of the semiconductor body; and an impurity in the semiconductor body. A profile of concentration of the impurity has a penetration depth from the second surface into the semiconductor body along a vertical direction. The profile of concentration has a concentration plateau along a vertical segment ranging from 30% to 70% of the penetration depth, the plateau having a fluctuation of the concentration of less than 20%.

Dependencies are inferred from the claim text.