Selective Directed Assembly-Based Printing of Metal Oxide Dielectric Thin Films
AssigneeNortheastern University
InventorsAhmed Mostafa ABDELAZIZ, Ahmed BUSNAINA
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Abstract
A method for selectively printing metal oxide dielectric films using directed fluidic assembly is provided. The metal oxide films are printed from a liquid suspension of nanoparticulate precursors using a dip coating mechanism. The resulting films can be fully cured at about 100° C. in conjunction with UV photoannealing. The printed metal oxide films can serve as the dielectric material for a variety of passive and active electronic devices. The method reduces cost and energy consumption for the fabrication of electronic devices, and can be used to fabricate devices on flexible polymer substrates.
Claims22
A method of depositing a patterned metal oxide layer on a substrate, the method comprising:
- (a) providing (i) a substrate comprising a pattern of voids suitable for use in a directed assembly process and (ii) a colloidal suspension comprising a chemical precursor of a metal oxide in a solvent;
- (b) treating the suspension to promote polycondensation of the chemical precursor to form metal-oxygen-metal bonds, thereby forming nanoparticles comprising the metal oxide;
- (c) dip coating the substrate in a suspension comprising the nanoparticles from step (b) and a dip coating solvent, whereby the nanoparticles are assembled in the voids to form a patterned metal oxide layer;
- (d) treating the patterned metal oxide layer to remove impurities;
- (e) densifying the purified metal oxide layer resulting from step (d).
Dependencies are inferred from the claim text.