SYSTEMS AND METHODS FOR A DYNAMICALLY TUNABLE STRAIN QUANTUM SENSOR BASED ON h-BN
AssigneesToyota Motor Engineering & Manufacturing North America, Inc., Toyota Jidosha Kabushiki Kaisha
InventorsNaveed HUSSAIN, Songtao WU, Shuogo HIGASHI, Debasish BANERJEE
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Abstract
A method and computer program product for fabricating a quantum sensor, and a quantum sensor. The quantum sensor may be fabricated, wherein the quantum sensor includes a piezoelectric substrate. The quantum sensor may further include a plasmonic waveguide above the piezoelectric substrate. The quantum sensor may further include a 2D-material layer above the plasmonic waveguide. The quantum sensor may further include one or more electrical contacts below the piezoelectric substrate.
Claims20
A method comprising:
- fabricating a quantum sensor, wherein the quantum sensor includes:
- a piezoelectric substrate;
- a plasmonic waveguide above the piezoelectric substrate;
- a 2D-material layer above the plasmonic waveguide;
- and
- one or more electrical contacts below the piezoelectric substrate.
A computer program product residing on a computer readable storage medium having a plurality of instructions stored thereon which, when executed across one or more processors, causes at least a portion of the one or more processors to perform operations comprising:
- fabricating a quantum sensor, wherein the quantum sensor includes:
- a piezoelectric substrate;
- a plasmonic waveguide above the piezoelectric substrate;
- a 2D-material layer above the plasmonic waveguide;
- and
- one or more electrical contacts below the piezoelectric substrate.
A quantum sensor comprising:
- a quantum sensor, wherein the quantum sensor includes:
- a piezoelectric substrate;
- a plasmonic waveguide above the piezoelectric substrate;
- a 2D-material layer above the plasmonic waveguide;
- and
- one or more electrical contacts below the piezoelectric substrate.
Dependencies are inferred from the claim text.