Linear accelerator having robust power feedthrough

An ion implanter, comprising:

• an ion source to generate a continuous ion beam;
• and
• a linear accelerator, to receive the continuous ion beam, to generate a bunched ion beam therefrom, and to accelerate the bunched ion beam, the linear accelerator comprising a plurality of power feedthrough assemblies, arranged at a plurality of acceleration stages, respectively, wherein a given power feedthrough assembly comprises:
• an insulating housing;
• a conductive rod, extending through the insulating housing;
• and
• a flange, coupled to mechanically connect the insulating housing to a wall of the linear accelerator, wherein the insulating housing comprises a coupling structure that couples the insulating housing to the conductive rod and to the flange, wherein the coupling structure comprises at least one protrusion configured to couple with an external structure that is located in the flange or the conductive rod.

A power feedthrough assembly for a linear accelerator, comprising:

• an insulating housing, comprising a curved Al2O3 shell;
• a conductive rod, coupled to deliver an RF voltage to a given acceleration stage of the linear accelerator, the conductive rod coupled to extend from a resonator through the insulating housing and into a vacuum enclosure of the linear accelerator;
• and
• a flange, coupled to mechanically connect the insulating housing to a wall of the vacuum enclosure, wherein the insulating housing comprises a coupling structure that couples the insulating housing to the conductive rod and to the flange, wherein the coupling structure comprises at least one protrusion configured to couple with an external structure that is located in the flange or the conductive rod.