Electron beam microscope

An electron beam microscope, comprising:

• an electron beam source configured to generate an electron beam;
• an object holder configured to mount the object at the location of object;
• an objective lens along a beam path of the electron beam between the electron beam source and the location of the object and configured to focus the electron beam on the location of the object;
• a first electron detector configured to detect electrons generated at the object by the electron beam;
• and
• a second electron detector configured to detect electrons generated at the object by the electron beam,
• wherein the second electron detector comprises a converter, a first electrode, a second electrode, a tube and an insulator,
• wherein the beam path of the electron beam passes through the tube in a longitudinal direction of the tube,
• wherein each of the converter of the second electron detector, the first electrode and the second electrode is arranged outside of the tube and spaced from the others along the beam path of the electron beam,
• wherein the converter of the second electron detector is along the beam path of the electron beam between the electron beam source and the first electrode so that electrons generated at the object pass through the first electrode and are incident on the converter,
• wherein the converter of the second electron detector is configured to convert the electrons generated at the object into electrical or optical signals;
• wherein the second electrode is along the beam path of the electron beam between the first electrode and the converter of the second electron detector,
• wherein the electrons generated at the object pass through the second electrode after passing through the first electrode,
• wherein the tube comprises an electrically conductive inner lateral surface;
• wherein the insulator comprises an electrically insulating material;
• wherein the insulator surrounds the tube along the beam path of the electron beam and at least in a region between the first electrode and the second electrode and in a region between the second electrode and the converter,
• wherein the first electron detector comprises a converter configured to convert electrons generated at the object into electrical or optical signals, and
• wherein the converter of the first electron detector is along the beam path of the electron beam between the second electrode and the location of the object or between the first electrode and the location of the object and, as seen in the direction of the beam path, at least partially overlaps with the insulator.

An electron beam microscope, comprising:

• an electron beam source configured to generate an electron beam;
• an object holder configured to mount an object at an location of the object on which the electron beam is incident;
• an objective lens arranged along the beam path of the electron beam between the electron beam source and the location of the object and configured to focus the electron beam on the location of the object;
• a first electron detector configured to detect electrons generated at the object by the electron beam;
• and
• a second electron detector configured to detect electrons generated at the object by the electron beam;,
• wherein the second electron detector comprises a converter configured to convert electrons generated at the object and incident on an electron reception surface of the converter into electrical or optical signals,
• wherein the first electron detector comprises a converter configured to convert electrons generated at the object and incident on an electron reception surface of the converter into light,
• wherein the converter of the first electron detector comprises a scintillator body providing the electron reception surface of the converter and comprising a scintillator material that generates the light from the electrons generated at the object and incident on the scintillator body, and
• wherein the following holds in a plane orthogonal to the beam path of the electron beam and intersecting the scintillator body:
• during operation the electron beam passes through the plane at a centre;
• the scintillator body at least partially surrounds the centre;
• and
• the scintillator body is between the centre and a region of the plane traversed by the electrons generated at the object by the electron beam and incident on the electron reception surface of the second electron detector.