Back to results
US 2026/0072288 A1Published application
Laser system and method for manufacturing electronic device
AssigneeGigaphoton Inc.
InventorMasaki ARAKAWA
Life of this patent
Estimating the term…
Abstract
A laser system includes a laser oscillator, a lens array including a first lens on which a first part of a laser beam output from the laser oscillator is incident and a second lens on which a second part different from the first part of the laser beam and having a smaller spatial coherence length than the first part is incident, the second lens having a smaller pitch than the first lens, and a condenser lens configured to superimpose the first and second parts that have passed through the lens array on a common irradiation surface.
Claims20
A laser system comprising:
- a laser oscillator;
- a lens array including
- a first lens on which a first part of a laser beam output from the laser oscillator is incident and
- a second lens on which a second part different from the first part of the laser beam and having a smaller spatial coherence length than the first part is incident, the second lens having a smaller pitch than the first lens;
- and
- a condenser lens configured to superimpose the first and second parts that have passed through the lens array on a common irradiation surface.
3 more elements
A method for manufacturing an electronic device comprising:
- generating a laser beam with a laser system, the laser system including
- a laser oscillator,
- a lens array including
- a first lens on which a first part of the laser beam output from the laser oscillator is incident and
- a second lens on which a second part different from the first part of the laser beam and having a smaller spatial coherence length than the first part is incident, the second lens having a smaller pitch than the first lens, and
- a condenser lens configured to superimpose the first and second parts that have passed through the lens array on a common irradiation surface;
- outputting the laser beam to an exposure apparatus;
- and
- exposing a photosensitive substrate to the laser beam within the exposure apparatus to manufacture the electronic device.
6 more elements
Dependencies are inferred from the claim text.