Inspection Device and Inspection Method

An inspection method for inspecting an inspection object having an imaging device to which light is incident from a surface opposite to a wiring layer using an inspection apparatus, wherein the inspection apparatus includes:

• a light-transmitting placing table having a placing surface on which the inspection object is placed so that the surface opposite to the wiring layer of the imaging device faces the placing surface;
• a placing table operating part configured to move the placing table vertically and horizontally;
• and
• an irradiation device configured to irradiate inspection light to the imaging device through the placing surface;
• the inspection method comprising:
• changing a relative position of the irradiation device with respect to the inspection object placed on the placing surface by moving the placing table using the placing table operating part;
• and
• after changing the relative position of the irradiation device with respect to the inspection object, irradiating the inspection light to the imaging device using the irradiation device to perform inspection of the imaging device.