Fluid control apparatus and heater

A fluid control apparatus comprising:

• an integrated gas line including a plurality of flow path blocks arranged in series to form a flow path and a plurality of fluid control devices arranged on the plurality of flow path blocks;
• a supply pipe arranged under the flow path blocks so as to extend in an arrangement direction of the flow path blocks and allowing a fluid to flow therethrough;
• and a branch pipe branched from the supply pipe and supplying the fluid to the integrated gas line,
• the fluid control apparatus further comprising:
• a first heater arranged on each of both sides of the flow path blocks;
• a heat transfer block having a prismatic shape having a substantially U-shaped cross section for encasing the supply pipe and transferring heat to the supply pipe;
• a second heater arranged on each of both sides of the heat transfer block and heating the heat transfer block;
• and
• a first heat insulation plate arranged between the flow path blocks and the heat transfer block and preventing a heat transfer between the flow path blocks and the heat transfer block.