Vacuum pump with an eddy current damper
OwnerChristian Hoesgen, Dirk Christian Kalisch +4inventors
InventorsChristian Hoesgen, Dirk Christian Kalisch, Alois Greven, Daniel Radermacher, Christian Berger, Roman Dembek
Life of this patent
Estimating the term…
Abstract
Vacuum pump, in particular a turbomolecular vacuum pump, comprising a housing and a rotor shaft disposed in the housing and rotatably supported by at least on permanent magnet bearing. Therein, the magnet bearing is arranged at one end of the rotor shaft and wherein the magnet bearing comprises a static bearing element and a rotated bearing element radially arranged next to each other. An eddy current damper is provided having a conductive disk connected to the static bearing element.
Claims10
A vacuum pump, in particular a turbomolecular vacuum pump, comprising a housing;
- a rotor shaft disposed in the housing and rotatably supported by at least on permanent magnet bearing;
- wherein the magnet bearing is arranged at one end of the rotor shaft and
- wherein the magnet bearing comprises a static bearing element and a rotated bearing element radially arranged next to each other and an eddy current damper having a conductive disk connected to the static bearing element.
Dependencies are inferred from the claim text.