Shut-off valve and vacuum pump
AssigneeShimadzu Corporation
InventorHiroaki KIMURA
Life of this patent
Estimating the term…
Abstract
A shut-off valve includes a valve seat disposed between a first opening and a second opening, and a valve body disposed on the second opening side of the valve seat and configured to move in a first direction from the second opening toward the first opening due to pressure of gas flowing from the second opening toward the first opening. The valve body has a valve body shaft extending in the first direction, and a contact surface configured to contact the valve seat when the valve body moves in the first direction. The contact surface is disposed on the second opening side of a first end on the first direction side of the valve body shaft.
Claims5
A shut-off valve, comprising:
- a valve seat disposed between a first opening and a second opening;
- and
- a valve body disposed on the second opening side of the valve seat and configured to move in a first direction from the second opening toward the first opening due to pressure of gas flowing from the second opening toward the first opening,
- wherein the valve body has:
- a valve body shaft extending in the first direction, and
- a contact surface configured to contact the valve seat when the valve body moves in the first direction, and
- the contact surface is disposed on the second opening side of a first end on the first direction side of the valve body shaft.
Dependencies are inferred from the claim text.