Modular ladder systems and methods thereof
AssigneeASM IP Holding B.V.
InventorSenthil Sivaraman
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AssigneeASM IP Holding B.V.
InventorSenthil Sivaraman
Estimating the term…
A modular ladder system is provided. The modular ladder system includes a vertical ladder assembly including a vertical support with a ladder bridge mount that is configured to dock with a first section of the platform and an angled ladder. The vertical support may also include one or more adaptable parts that is configured to provide a fall prevention barrier according to a shape of the process module. The adaptable part may be a foldable hinged step cover that couples with a second section of the platform or one or more guard rails that rest below the ladder bridge mount in a stowed position and is coupled with the ladder bridge mount. Further, the vertical support and the angled ladder may be detachable. The angled ladder may include an extension plate that provides a bridge between ladder bridge mount and a swing gate of the ladder system.
A modular ladder system configured to provide access to a process module of a semiconductor process system, the modular ladder system comprising:
A method of deploying a modular ladder system, the method comprises:
A fall prevention system comprising:
Dependencies are inferred from the claim text.