Transition metal cluster compound, photosensitive composition, pattern forming method, and method for producing substrate
AssigneeMitsubishi Chemical Corporation
InventorsKeishi Yamamoto, Shigeki Hattori, Kazuhiro Nagayama, Akane Kato, Ellie Iwasaki
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Abstract
An object of the present invention is to provide a transition metal cluster compound by which miniaturization of a circuit pattern can be realized; a photosensitive composition containing the transition metal cluster compound; and a pattern forming method using the photosensitive composition. The transition metal cluster compound is characterized by including 2 or more and 20 or less transition metal atoms and two or more types of carboxy ligands, wherein at least one type of the carboxy ligands includes an alicyclic structure having a double bond.
Claims16
A transition metal cluster compound, comprising:
- 2 or more and 20 or less transition metal atoms, and
- two or more types of carboxy ligands,
- wherein at least one type of the carboxy ligands comprises an alicyclic structure having a double bond, and the transition metal cluster compound optionally comprises oxygen and/or a hydroxyl group.
Dependencies are inferred from the claim text.