Support apparatus and substrate polishing apparatus including the same

A substrate polishing apparatus comprising:

• a polishing portion configured to polish a substrate;
• and
• a support apparatus configured to support the polishing portion and adjust a tilt of the polishing portion,
• the polishing portion includes:
• a rotation shaft configured to be rotatable about a vertical direction as an axial direction;
• a housing defining a space inside to accommodate an upper part of the rotation shaft;
• and
• a polishing head having an upper surface connected to a lower end of the rotation shaft,
• the support apparatus includes:
• a support portion configured to support the polishing portion;
• a fastening portion configured to fasten the polishing portion and the support portion;
• and
• a tilt adjustment portion configured to adjust the tilt of the polishing portion,
• the fastening portion includes:
• a fastening body attached to a side surface of the housing;
• protrusions protruding outwardly from the fastening body along a circumferential direction of the side surface of the housing, and the protrusions defining internal spaces therein;
• the support portion surrounding the side surface of the housing, and defining insertion holes on an inner surface of the support portion, the insertion holes configured to receive respective ones of the protrusions;
• the tilt adjustment portion including:
• tilt adjustment shafts penetrating the support portion to pass through respective ones of the internal spaces and respective ones of the insertion holes, and the tilt adjustment shafts including catch fringes extended outwardly from parts of the tilt adjustment shafts corresponding to the internal spaces respectively and caught on ceiling walls and floor walls of the protrusions;
• and
• fixing portions configured to fix each of the tilt adjustment shafts to a position set with respect to the support portion,
• the tilt adjustment shafts and the support portion screw-connected to each other.

A substrate polishing apparatus comprising:

• a polishing portion configured to polish a substrate;
• and
• a support apparatus configured to support the polishing portion and adjust a tilt of the polishing portion,
• the polishing portion including
• a rotation shaft configured to rotate about a vertical direction as an axial direction;
• a housing defining a space inside to accommodate an upper part of the rotation shaft;
• and
• a polishing head having an upper surface connected to a lower end of the rotation shaft,
• the support apparatus including
• a support portion configured to support the polishing portion;
• a fastening portion configured to fasten the polishing portion and the support portion;
• and
• a tilt adjustment portion configured to adjust the tilt of the polishing portion,
• the fastening portion including
• a fastening body attached to a side surface of the housing;
• protrusions protruding outwardly from the fastening body along a circumferential direction of the side surface of the housing, and the protrusions defining internal spaces therein;
• the support portion surrounding the side surface of the housing, and defining insertion holes on an inner surface of the support portion, the insertion holes configured to receive respective ones of the protrusions;
• the tilt adjustment portion including
• tilt adjustment shafts penetrating the support portion to pass through respective ones of the internal spaces and respective ones of the insertion holes, and the tilt adjustment shafts including catch fringes extended outwardly from parts of the tilt adjustment shafts corresponding to the internal spaces respectively and caught on ceiling walls and floor walls of the protrusions;
• and
• fixing portions configured to fix each of the tilt adjustment shafts to a position set with respect to the support portion,
• the tilt adjustment shafts and the support portion screw-connected to each other,
• the fastening portion including
• an upper fastening portion configured to be fastened to an upper part of the housing;
• and
• a lower fastening portion configured to be fastened to the lower part of the housing.