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US 2026/0068531 A1Published application
Composite substrate and method of producing composite substrate
AssigneeNGK Insulators, Ltd.
InventorsYudai UNO, Masahiro SAKAI, Makoto TANI, Masahiko NAMERIKAWA
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Abstract
A composite substrate includes: a support substrate; and a piezoelectric film which is arranged above the support substrate, and includes a polycrystalline substance, wherein a dissimilar material portion including a material different from a material for forming the polycrystalline substance is formed at an end portion on at least one of an upper surface side or a lower surface side of the piezoelectric film.
Claims13
A composite substrate, comprising:
- a support substrate;
- and
- a piezoelectric film which is arranged above the support substrate, and includes a polycrystalline substance,
- wherein a dissimilar material portion including a material different from a material for forming the polycrystalline substance is formed at an end portion on at least one of an upper surface side or a lower surface side of the piezoelectric film.
1 more element
A method of producing a composite substrate, comprising:
- preparing a piezoelectric substrate including a sintered body and having an upper surface and a lower surface that face each other;
- laminating a dissimilar material layer including a material different from a material for forming the piezoelectric substrate on a side of at least one of the upper surface or the lower surface of the piezoelectric substrate to charge a dissimilar material to a recessed portion formed at an end portion of the piezoelectric substrate in a thickness direction;
- and
- joining the piezoelectric substrate and a support substrate to each other.
1 more element
Dependencies are inferred from the claim text.