Semiconductor device and methods of formation
AssigneeTaiwan Semiconductor Manufacturing Company, Ltd.
InventorsTzu Jung TIEN, Cheung CHENG, Wen-Chih CHIANG
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AssigneeTaiwan Semiconductor Manufacturing Company, Ltd.
InventorsTzu Jung TIEN, Cheung CHENG, Wen-Chih CHIANG
Estimating the term…
A high-voltage transistor may include a composite gate dielectric layer having multiple regions with different dielectric constant values and/or a composite gate structure having multiple regions of different work function values. The composite dielectric layer having multiple regions with different dielectric constant values and/or the composite gate structure having multiple regions with different work functions increases the threshold voltage uniformity across a channel region of the high-voltage transistor. The increased threshold voltage uniformity may enable a low subthreshold swing and a low subthreshold off-stage current leakage to be achieved for the high-voltage transistor, which increases the operating efficiency of the high-voltage transistor and enables the size of the high-voltage transistor to be reduced without increasing (or with minimal increase to) the subthreshold swing and and/or the subthreshold off-stage current leakage of the high-voltage transistor.
A transistor structure, comprising:
A transistor structure, comprising:
A method, comprising:
Dependencies are inferred from the claim text.