Back to results
US 2026/0066210 A1Published application
Ion implantation device comprising energy filter and additional heating element
AssigneeMi2-Factory GmbH
InventorsFlorian KRIPPENDORF, Constantin CSATO
Life of this patent
Estimating the term…
Abstract
An ion implantation device (20) is provided comprising an energy filter (25) with a structured membrane, wherein the energy filter (25) is heated by absorbed energy from the ion beam, and at least one additional heating element (50a-d, 55a-d, 60, 70) for heating the energy filter (25).
Claims6
An ion implantation device, comprising:
- an energy filter with a structured membrane, wherein the energy filter is heated by absorbed energy from the ion beam;
- and at least one additional heating element for heating the energy filter.
Dependencies are inferred from the claim text.