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US 2026/0064019 A1Published application
Light source apparatus, exposure apparatus, and article manufacturing method
AssigneeCanon Kabushiki Kaisha
InventorMAHIRO SAITO
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Abstract
A light source apparatus includes an element array in which a plurality of light emitting elements are arrayed, wherein the plurality of light emitting elements include a first light emitting element, and a second light emitting element having temperature characteristic, which indicates a relationship between an element temperature and a peak wavelength, different from a temperature characteristic of the first light emitting element, and the first light emitting element and the second light emitting element are arrayed in accordance with temperature unevenness in the element array.
Claims11
A light source apparatus comprising:
- an element array in which a plurality of light emitting elements are arrayed,
- wherein the plurality of light emitting elements include:
- a first light emitting element, and
- a second light emitting element having temperature characteristic, which indicates a relationship between an element temperature and a peak wavelength, different from a temperature characteristic of the first light emitting element, and
- the first light emitting element and the second light emitting element are arrayed in accordance with temperature unevenness in the element array.
2 more elements
Dependencies are inferred from the claim text.