Radiation-sensitive composition, method for forming pattern and onium salt compound
AssigneeJsr Corporation
InventorsHajime INAMI, Fuyuki EGAWA, Ryuichi NEMOTO, Masayuki MIYAKE, Kensuke MIYAO
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AssigneeJsr Corporation
InventorsHajime INAMI, Fuyuki EGAWA, Ryuichi NEMOTO, Masayuki MIYAKE, Kensuke MIYAO
Estimating the term…
A radiation-sensitive composition includes: an onium salt compound represented by formula (1); a polymer including a structural unit (I) which includes an acid-dissociable group; and a solvent. W is a cyclic structure having 3 to 40 ring members formed together with the two carbon atoms; a formula between the two carbon atoms below represents a single bond or a double bond, , A is one of groups represented by formulae (A-1) to (A-7); R1 is a monovalent organic group having 1 to 20 carbon atoms, a cyano group, a nitro group, a carboxy group, a hydroxy group, an amino group, a halogen atom, or a thiol group, when there are a plurality of R1s, the plurality of R1s are same as or different from each other; m1 is an integer of 0 to 4; and Z+ is a monovalent radiation-sensitive onium cation.
A radiation-sensitive composition comprising:
An onium salt compound represented by formula (1),
Dependencies are inferred from the claim text.