Compensator, microscope system, and compensation method
AssigneeNikon Corporation
InventorsYuki TERUI, Shogo Toda
Life of this patent
Estimating the term…
Abstract
A compensator that compensates for negative group delay dispersion of pulsed light irradiated onto a sample via an optical system, the negative group delay dispersion being caused to occur by the optical system. The compensator includes a plurality of plates that generate positive group delay dispersion, and a switching unit that can switch each plate between a first state where the plate is arranged in a position through which the pulsed light passes and a second state where the plate is arranged in a position through which the pulsed light does not pass, and can set a predetermined combination of the plurality of plates to the first state according to a wavelength of the pulsed light.
Claims14
-12. (canceled)
A compensator that compensates for negative group delay dispersion of pulsed light irradiated onto a sample via an optical system, the negative group delay dispersion being caused to occur by the optical system, the compensator comprising
- a plurality of plates that generate positive group delay dispersion, and
- a switching unit configured to switch each plate between a first state where the plate is arranged in a position through which the pulsed light passes and a second state where the plate is arranged in a position through which the pulsed light does not pass, according to a wavelength of the pulsed light.
A compensation method for compensating for negative group delay dispersion of pulsed light irradiated onto a sample via an optical system, the negative group delay dispersion being caused to occur by the optical system, the compensation method comprising
- a step of, for a plurality of plates that generate positive group delay dispersion, switching each plate between a first state where the plate is arranged in a position through which the pulsed light passes and a second state where the plate is arranged in a position through which the pulsed light does not pass, according to a wavelength of the pulsed light.
Dependencies are inferred from the claim text.