# US 2026/0063733 A1 · Magnetic sensor having sensing elements on sloped substrate > Agents: this data is available as JSON from the patentgrep API and MCP server — see https://patentgrep.com/llms.txt - Number: US 2026/0063733 A1 - Document ID: US20260063733A1 - Status: Published application - Kind: A1 - Application number: 18/817,513 - Filed: 2024-08-28 - Published: 2026-03-05 - Earliest claimed: 2024-08-28 - Assignees: Allegro MicroSystems, LLC - Applicants: Allegro MicroSystems, LLC - Inventors: Maxim Klebanov; Paolo Campiglio; Yen Ting Liu; Samridh Jaiswal; Yu Chun Huang; William P. Taylor; Harianto Wong - Web page: https://patentgrep.com/patent/US20260063733A1 ## CPC - G01R 33/0005: {Geometrical arrangement of magnetic sensor elements; Apparatus combining different magnetic sensor types (G01R33/0206 takes precedence)} - G01R 33/0023: {Electronic aspects, e.g. circuits for stimulation, evaluation, control; Treating the measured signals; calibration (G01R33/0017 takes precedence)} - G01R 33/0047: {Housings or packaging of magnetic sensors (packaging of semiconductor devices H10W99/00); Holders} - G01R 33/0206: {Three-component magnetometers} - G01R 33/072: {Constructional adaptation of the sensor to specific applications} - G01R 33/093: {using multilayer structures, e.g. giant magnetoresistance sensors (thin magnetic films H01F10/00)} - G01R 33/098: {comprising tunnel junctions, e.g. tunnel magnetoresistance sensors} - G01R: MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES (indicating correct tuning of resonant circuits H03J3/12) ## Abstract Methods and apparatus for a magnetic sensor having a substrate with a major surface and opposing sloped surfaces and magnetoresistive (MR) magnetic field sensing elements coupled in a bridge configuration. At least some of the magnetic field sensing elements are located on the sloped surfaces. In embodiments, the sensor comprises a 3D magnetometer. In some embodiments, the bridge configuration comprises an x-axis bridge, a y-axis bridge, and a z-axis bridge. ## Claims ### Claim 1 A sensor, comprising: a substrate having a major surface and opposing sloped surfaces; and magnetoresistive (MR) magnetic field sensing elements coupled in a bridge configuration, wherein at least some of the magnetic field sensing elements are located on the sloped surfaces. ### Claim 2 (depends on 1) The sensor according to claim 1, wherein the sensor comprises a 3D magnetometer. ### Claim 3 (depends on 2) The sensor according to claim 2, wherein the bridge configuration comprises an x-axis bridge, a y-axis bridge, and a z-axis bridge. ### Claim 4 (depends on 3) The sensor according to claim 3, wherein the x-axis bridge includes a first pair of bridge elements on a first one of the opposing sloped surfaces and a second pair of bridge elements on a second one of the opposing sloped surfaces for sensitivity in the x-axis. ### Claim 5 (depends on 4) The sensor according to claim 4, wherein the first and second opposing sloped surfaces have opposite slope angles. ### Claim 6 (depends on 4) The sensor according to claim 4, wherein the y-axis bridge includes a third pair of bridge elements on a third one of the opposing sloped surfaces and a fourth pair of bridge elements on a fourth one of the opposing sloped surfaces for sensitivity in the x-axis, wherein the x-axis and the y-axis are perpendicular to each other. ### Claim 7 (depends on 6) The sensor according to claim 6, wherein the third and fourth opposing sloped surfaces oppose each other and have opposite slope angles. ### Claim 8 (depends on 6) The sensor according to claim 6, wherein the z-axis bridge includes at least four bridge elements each located on different ones of the sloped surfaces for sensitivity in the z-axis. ### Claim 9 (depends on 1) The sensor according to claim 1, further including further magnetic field sensing elements located on a major surface of the substrate. ### Claim 10 (depends on 9) The sensor according to claim 9, wherein the further magnetic field sensing elements are configured to calibrate the magnetic field sensing elements on the sloped surfaces. ### Claim 11 (depends on 1) The sensor according to claim 1, wherein at least some of the magnetic field sensing elements are located at different depths from the major surface of the substrate for detecting field gradients. ### Claim 12 (depends on 11) The sensor according to claim 11, wherein the at least some of the magnetic field sensing elements located at different depths from the major surface of the substrate are positioned on respective steps formed in the sloped surfaces. ### Claim 13 (depends on 12) The sensor according to claim 12, wherein first ones of the at least some of the magnetic field sensing elements are located on the sloped surfaces. ### Claim 14 (depends on 12) The sensor according to claim 12, wherein second ones of the at least some of the magnetic field sensing elements are located on the steps which are parallel to the major surface of the substrate. ### Claim 15 (depends on 1) The sensor according to claim 1, wherein the magnetic field sensing elements comprise tunnelling magnetoresistive (TMR) elements. ### Claim 16 (depends on 1) The sensor according to claim 1, further including Hall elements deposited on at least one of the sloped surfaces. ### Claim 17 (depends on 16) The sensor according to claim 16, wherein the sloped surfaces having the deposited Hall elements are formed by a v-shaped etch. ### Claim 18 (depends on 16) The sensor according to claim 16, wherein the sloped surfaces having the deposited Hall elements are extend from a flat bottom surface. ### Claim 19 (depends on 17) The sensor according to claim 17, wherein the angle of the sloped surfaces having the deposited Hall elements formed by the v-shaped etch corresponds to a crystal lattice angle of the substrate. ### Claim 20 A method, comprising: manipulating a substrate, which forms part of a sensor, to have a major surface and opposing sloped surfaces; and coupling magnetoresistive (MR) magnetic field sensing elements in a bridge configuration, wherein at least some of the magnetic field sensing elements are located on the sloped surfaces. ### Claim 21 (depends on 20) The method according to claim 20, wherein the sensor comprises a 3D magnetometer. ### Claim 22 (depends on 21) The method according to claim 21, wherein the bridge configuration comprises an x-axis bridge, a y-axis bridge, and a z-axis bridge. ### Claim 23 (depends on 22) The method according to claim 22, wherein the x-axis bridge includes a first pair of bridge elements on a first one of the opposing sloped surfaces and a second pair of bridge elements on a second one of the opposing sloped surfaces for sensitivity in the x-axis. ### Claim 24 (depends on 23) The method according to claim 23, wherein the first and second opposing sloped surfaces have opposite slope angles. ### Claim 25 (depends on 23) The method according to claim 23, wherein the y-axis bridge includes a third pair of bridge elements on a third one of the opposing sloped surfaces and a fourth pair of bridge elements on a fourth one of the opposing sloped surfaces for sensitivity in the x-axis, wherein the x-axis and the y-axis are perpendicular to each other. ### Claim 26 (depends on 25) The method according to claim 25, wherein the third and fourth opposing sloped surfaces oppose each other and have opposite slope angles. ### Claim 27 (depends on 25) The method according to claim 25, wherein the z-axis bridge includes at least four bridge elements each located on different ones of the sloped surfaces for sensitivity in the z-axis. ### Claim 28 (depends on 20) The method according to claim 20, further including employing further magnetic field sensing elements located on a major surface of the substrate. ### Claim 29 (depends on 28) The method according to claim 28, wherein the further magnetic field sensing elements are configured to calibrate the magnetic field sensing elements on the sloped surfaces. ### Claim 30 (depends on 20) The method according to claim 20, wherein at least some of the magnetic field sensing elements are located at different depths from the major surface of the substrate for detecting field gradients. ### Claim 31 (depends on 30) The method according to claim 30, wherein the at least some of the magnetic field sensing elements located at different depths from the major surface of the substrate are positioned on respective steps formed in the sloped surfaces. ### Claim 32 (depends on 31) The method according to claim 31, wherein first ones of the at least some of the magnetic field sensing elements are located on the sloped surfaces. ### Claim 33 (depends on 31) The method according to claim 31, wherein second ones of the at least some of the magnetic field sensing elements are located on the steps which are parallel to the major surface of the substrate. ### Claim 34 (depends on 20) The method according to claim 20, wherein the magnetic field sensing elements comprise tunnelling magnetoresistive (TMR) elements. ### Claim 35 (depends on 20) The method according to claim 20, further including Hall elements deposited on at least one of the sloped surfaces. ### Claim 36 (depends on 35) The method according to claim 35, wherein the sloped surfaces having the deposited Hall elements are formed by a v-shaped etch. ### Claim 37 (depends on 35) The method according to claim 35, wherein the sloped surfaces having the deposited Hall elements are extend from a flat bottom surface. ### Claim 38 (depends on 36) The method according to claim 36, wherein the angle of the sloped surfaces having the deposited Hall elements formed by the v-shaped etch corresponds to a crystal lattice angle of the substrate.