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AssigneeXingr Technologies (Zhejiang) Limited
InventorCHOON LEONG LOU
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The present disclosure provides a supporting structure of a membrane probe card. The supporting structure includes a frame body, a fixture, adjustment mechanisms, and first elastic structures. The frame body is configured to be in contact with the membrane. The fixture is configured to fixate the frame body on the substrate, and confine the frame body to be movable along a direction perpendicular to the substrate. The fixture includes through holes. The adjustment mechanisms are movably and tightly disposed in the through holes, respectively. The first elastic structures are disposed in a first space of the frame body, and each of the first elastic structures corresponds in position to one adjustment mechanism. The adjustment mechanisms are configured to adjust elastic forces of the first elastic structures.
A supporting structure of a membrane probe card, wherein the supporting structure is disposed between a substrate and a membrane fixed to the substrate to support a test area of the membrane, the supporting structure comprising:
A test method for a membrane probe card, wherein the membrane probe card comprising a substrate, a supporting structure and a membrane, wherein the supporting structure is disposed between the substrate and the membrane and configured to support a test area in the membrane, the test method comprising the steps of:
Dependencies are inferred from the claim text.