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AssigneeFormFactor, Inc.
InventorsQuan Yuan, Daniel Rishavy, Michael E. Simmons, Divya Pratap
Estimating the term…
Optoelectronic probe cards, optoelectronic testers, and related methods. The optoelectronic probe cards are configured for optical and electrical communication with a device under test (DUT) on a device substrate that includes a plurality of DUTs and includes an optical probe assembly and an electrical probe assembly. The optical probe assembly includes a plurality of lensed optical probes configured for non-contact optical communication with at least one optoelectronic device of the DUT. The electrical probe assembly includes a plurality of electrical probes configured for electrical communication with the DUT via electrical contact between the plurality of electrical probes and a plurality of contact pads of the DUT. The optoelectronic testers include a chuck, the optoelectronic probe card, an optical signal generation and analysis assembly, and an electrical signal generation and analysis assembly. The methods include actively and/or passively aligning components of the optoelectronic probe card with corresponding components of the DUT.
An optoelectronic probe card for optical and electrical communication with a device under test (DUT) on a device substrate that includes a plurality of DUTs, the optoelectronic probe card comprising:
A method of testing a device under test (DUT), which is on a device substrate that includes a plurality of DUTs, utilizing an optoelectronic probe card, wherein the optoelectronic probe card includes an optical probe assembly that includes a plurality of lensed optical probes and an electrical probe assembly that includes a plurality of electrical probes, and further wherein the plurality of lensed optical probes and the plurality of electrical probes define a fixed relative orientation therebetween, the method comprising:
A method of testing a device under test (DUT), which is on a device substrate that includes a plurality of DUTs, utilizing an optoelectronic probe card, wherein the optoelectronic probe card includes an optical probe assembly that includes a plurality of lensed optical probes and an electrical probe assembly that includes a plurality of electrical probes, and further wherein the plurality of lensed optical probes and the plurality of electrical probes define a fixed relative orientation therebetween, the method comprising:
A method of testing a device under test (DUT), which is on a device substrate that includes a plurality of DUTs, utilizing an optoelectronic probe card, wherein the optoelectronic probe card includes an optical probe assembly that includes a plurality of lensed optical probes, and an electrical probe assembly that includes a plurality of electrical probes, the method comprising:
Dependencies are inferred from the claim text.