US 2026/0063576 A1 · APPARATUS AND METHOD FOR IMPROVED ELECTRON BEAM INSPECTION WITH PROGRAMMABLE ANGLE AND ENERGY DETECTION

Abstract

An electron detector includes a detector body having a detector surface with an annular geometry and a central aperture configured to allow a focused electron beam to pass through the detector body toward a sample. The detector surface is configured to face the sample, and a plurality of detector devices are located on the detector surface. Each of the plurality of detector devices is configured to generate an electrical signal in response to interaction with an electron backscattered from the sample. According to various embodiments, the plurality of detector devices includes at least a first two detector devices separated from one another along a radial direction along the detector surface and at least a second two detector devices separated from one another along an angular direction along the detector surface. The detector devices are configured to determine both a polar incidence angle and an azimuthal incidence angle of detected electrons.

Claims20

Dependent claims

An electron detector, comprising:

a detector body comprising a detector surface that has an annular geometry and a central aperture configured to allow a focused electron beam to pass through the detector body toward a sample, wherein the detector surface is configured to face the sample;
and
a plurality of detector devices located on the detector surface, wherein each of the plurality of detector devices is configured to generate an electrical signal in response to interaction with an electron backscattered from the sample,
wherein the plurality of detector devices comprises at least a first two detector devices separated from one another along a radial direction along the detector surface and at least a second two detector devices separated from one another along an angular direction along the detector surface.

1 more element

A non-transitory computer-readable storage medium having computer program instructions stored thereon that, when executed by a processor of a controller device, cause the controller device to perform operations comprising:

controlling an electron source to generate a primary electron beam;
controlling a focusing device to generate a focused electron beam from the primary electron beam and to direct the focused electron beam to impinge on a sample;
and
controlling a detector to detect backscattered electrons over a programmable energy range and a programable range of angles including a polar incidence angle and an azimuthal incidence angle.

1 more element

Dependencies are inferred from the claim text.

Apparatus and method for improved electron beam inspection with programmable angle and energy detection

Life of this patent

Apparatus and method for improved electron beam inspection with programmable angle and energy detection

Life of this patent

Abstract

Claims20