Pressure sensor device

A pressure sensor device, comprising:

• a base having electroconductivity;
• an intermediate layer on the base and defining an opening;
• an electrode having electroconductivity on a first surface of the intermediate layer opposite to a second surface thereof facing the base, the electroconductive electrode including a diaphragm portion that overlaps the opening when viewed in a lamination direction, the electroconductive electrode being electrically insulated from the base,
• wherein the opening includes:
• a through-hole that extends through the intermediate layer in the lamination direction, and
• a pair of recesses on the first surface of the intermediate layer, the pair of recesses being positioned such that the through-hole is therebetween, and the pair of recesses are continuous with the through-hole, and recessed in the lamination direction,
• wherein the intermediate layer includes a base-side electroconductive layer is a bottom surface of the pair of recesses and is electrically connected to the base,
• wherein the diaphragm portion faces the base-side electroconductive layer in the lamination direction across the pair of recesses, and faces the base in the lamination direction across the through-hole;
• and
• protrusions on a surface of at least one of the base-side electroconductive layer or the diaphragm portion facing the pair of recesses and protruding toward the pair of recesses,
• wherein the protrusions include a pair of opposing portions that oppose each other while spaced in a width direction between the pair of recesses, and
• wherein the pair of opposing portions overlap edge portions of the pair of recesses closer to the through-hole when viewed in the lamination direction.