Wavelength detection device, laser device, and electronic device manufacturing method
AssigneeGigaphoton Inc.
InventorKohei KUSAYANAGI
Life of this patent
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Abstract
A wavelength detection device for an excimer laser includes a first housing accommodating a first etalon; a first heater arranged on an outer wall of the first housing, and configured to heat the first housing; a second housing connected to the first housing, and accommodating a first light concentrating optical system configured to cause light output from the first etalon to be imaged on a first sensor; a second heater arranged on an outer wall of the second housing, and configured to heat the second housing; and a processor configured to control a temperature of the first housing and a temperature of the second housing using the first heater and the second heater.
Claims19
A wavelength detection device for an excimer laser, comprising:
- a first housing accommodating a first etalon;
- a first heater arranged on an outer wall of the first housing, and configured to heat the first housing;
- a second housing connected to the first housing, and accommodating a first light concentrating optical system configured to cause light output from the first etalon to be imaged on a first sensor;
- a second heater arranged on an outer wall of the second housing, and configured to heat the second housing;
- and
- a processor configured to control a temperature of the first housing and a temperature of the second housing using the first heater and the second heater.
A laser device comprising;
- a laser resonator configured to output ultraviolet laser light;
- and
- a wavelength detection device configured to detect a wavelength of the laser light,
- the wavelength detection device comprising:
- a first housing accommodating a first etalon;
- a first heater arranged on an outer wall of the first housing, and configured to heat the first housing;
- a second housing connected to the first housing, and accommodating a first light concentrating optical system configured to cause light output from the first etalon to be imaged on a first sensor;
- a second heater arranged on an outer wall of the second housing, and configured to heat the second housing;
- and
- a processor configured to control a temperature of the first housing and a temperature of the second housing using the first heater and the second heater.
An electronic device manufacturing method, comprising:
- generating laser light using a laser device;
- outputting the laser light to an exposure apparatus;
- and
- exposing a photosensitive substrate to the laser light in the exposure apparatus to manufacture an electronic device,
- the laser device comprising:
- a laser resonator configured to output the ultraviolet laser light;
- and
- a wavelength detection device configured to detect a wavelength of the laser light, and
- the wavelength detection device comprising:
- a first housing accommodating a first etalon;
- a first heater arranged on an outer wall of the first housing, and configured to heat the first housing;
- a second housing connected to the first housing, and accommodating a first light concentrating optical system configured to cause light output from the first etalon to be imaged on a first sensor;
- a second heater arranged on an outer wall of the second housing, and configured to heat the second housing;
- and
- a processor configured to control a temperature of the first housing and a temperature of the second housing using the first heater and the second heater.
Dependencies are inferred from the claim text.