Suspension structure, and detection module and micro-displacement detection device comprising the same

Abstract

The present disclosure provides a suspension structure, and a detection module and a micro-displacement detection device comprising the same. The suspension structure comprises a central region, a fixing frame, and a plurality of suspension beams. The central region is circular and configured to fix an upper end of a probe. The fixing frame is provided around the central region. An inner edge of the fixing frame is circular and coaxial with the central region. The fixing frame is configured to fix to a clamping assembly. The plurality of suspension beams are provided between the central region and the fixing frame. Two ends of each of the plurality of suspension beams are connected with an outer edge of the central region and the inner edge of the fixing frame, respectively. The plurality of suspension beams are uniformly distributed in a circumferential direction of the central region.

Dependencies are inferred from the claim text.