Automatic computer-implemented detection of spot deformation
AssigneeApplied Materials Israel Ltd.
InventorsEinat FRISHMAN, Gadi ORON, Idan Avraham TAMIR
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Abstract
The presently disclosed subject matter includes a computer system and a computer-implemented method for detecting spot deformation in focused charged particle beam devices.
Claims20
A computer-implemented method of detecting spot deformation in a Focused Charged Particles Beam (FCPB) device, comprising:
- obtaining an image of a circular feature of a semiconductor specimen generated by the FCPB device while defocused;
- detecting radial aberration lines in the image;
- comparing between summed intensities of the radial aberration lines to determine irregularities;
- and
- assessing a degree of spot deformation based on the irregularities.
A computer system configured and operable to detect spot deformation in a Focused Charged Particles Beam (FCPB) device, the system comprising at least one processing circuitry configured to:
- obtain an image of a circular feature of a semiconductor specimen generated by the FCPB device while defocused;
- detect radial aberration lines in the image;
- compare between summed intensities of the radial aberration lines to determine irregularities;
- and
- assess a degree of spot deformation based on the irregularities.
A non-transitory computer readable storage medium tangibly embodying a program of instructions that, when executed by a computer, cause the computer to perform a method of detecting spot deformation in a Focused Charged Particles Beam (FCPB) device, comprising:
- obtaining an image of a circular feature of a semiconductor specimen generated by the FCPB device while defocused;
- detecting radial aberration lines in the image;
- comparing between summed intensities of the radial aberration lines to determine irregularities;
- assessing a degree of spot deformation based on the irregularities.
Dependencies are inferred from the claim text.