Method for separating indium oxide and tin oxide from indium tin oxide waste target by vacuum method

Abstract

A method for separating indium oxide and tin oxide from an ITO waste target by a vacuum method disclosed by the present disclosure, which relate to the field of resource recycling and utilization technology. The method Includes: take ITO waste target raw material, add indium to the ITO waste target raw material, heat and hold under vacuum conditions, then the Indium oxide is obtained by the volatilization of the suboxide of indium into the volatile, and the tin oxide is obtained by remaining of the tin oxide in the condensate. The present disclosure is based on the fact that indium oxide can generate volatile suboxide (In2O) when heated in indium melt, and the generated suboxide can evaporate to the condensation zone for condensation, thereby achieving the separation of indium oxide and tin oxide and achieving resource recovery and utilization of ITO waste target materials.

Dependencies are inferred from the claim text.