Method and apparatus for producing silicon-containing materials
AssigneeSchmid Silicon Techn ology GmbH
InventorsPeter Feinäugle, Jochem Hahn, Georgij Petrik, Christian Schmid
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Abstract
A process of producing silicon-containing materials includes converting a gas to a super-heated state in which it is at least partly in plasma form, and contacting the superheated gas with a silicon-containing first starting material to form a mixture including the gas and silicon, where-in the silicon-containing materials are produced by adding to the gas or the mixture a second starting material that can enter into a chemical reaction directly with the silicon in the mixture, or breaks down thermally on contact with the superheated gas and/or the mixture, and steps a. and b. are effected spatially separately from one another.
Claims4
An apparatus for producing particulate Si-containing materials, the apparatus comprising:
- a device with which a gas can be converted to a superheated state in which it is at least partly in plasma form;
- a reaction space;
- a first feed that opens into the reaction space for the superheated gas;
- a second feed that opens directly into the reaction space and through which a silicon-containing first starting material can be fed into the reaction space to form a mixture comprising the gas and silicon;
- and
- a third feed through which a second starting material can be fed into the apparatus, wherein the second starting material enters into a chemical reaction directly with the silicon in the mixture or breaks down thermally on contact with the superheated gas and/or the mixture.
Dependencies are inferred from the claim text.