Transducer
AssigneeSeiko Epson Corporation
InventorsTomonaga KOBAYASHI, Teruo TAKIZAWA
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AssigneeSeiko Epson Corporation
InventorsTomonaga KOBAYASHI, Teruo TAKIZAWA
Estimating the term…
A transducer includes a second semiconductor substrate on which a first insulation layer having a first metal layer on its surface is disposed, a first semiconductor substrate that overlaps the second semiconductor substrate and on which a second insulation layer having a second metal layer on its surface is disposed, a functional element located between the first semiconductor substrate and the second semiconductor substrate, and a eutectic reaction layer bonding the first semiconductor substrate and the second semiconductor substrate to each other in a bonding region located around the functional element. The eutectic reaction layer is a bonding layer formed by eutectic bonding between the first metal layer and the second metal layer. At least one of the first insulation layer and the second insulation layer has a recess having a bottom wider than the bonding region in plan view. The bonding region is located at the bottom.
A transducer comprising:
Dependencies are inferred from the claim text.