Non-contact microelectromechanical systems
AssigneeTexas Instruments Incorporated
InventorsWilliam Craig McDONALD, Jacky Dale GRIMMETT, Nathaniel B. GILLY
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Abstract
A microelectromechanical systems (MEMS) device includes a mirror, and a mirror post having a first end and a second end, the first end coupled to the mirror. Additionally, the MEMS device includes a hinge having a first side and a second side, the first side of the hinge coupled to the second end of the mirror post. Further, the MEMS device includes a pendulum electrode coupled to the second side of the hinge, and a pair of control electrodes spaced from the pendulum electrode.
Claims20
A microelectromechanical systems (MEMS) device comprising:
- a mirror;
- a mirror post having a first end and a second end, the first end coupled to the mirror;
- a hinge having a first side and a second side, the first side of the hinge coupled to the second end of the mirror post;
- a pendulum electrode coupled to the second side of the hinge;
- and
- a pair of control electrodes spaced from the pendulum electrode.
A microelectromechanical systems (MEMS) device, the MEMS device comprising:
- a mirror;
- a mirror post having a first end and a second end, the first end coupled to the mirror;
- a hinge having a first side and a second side, the first side of the hinge coupled to the mirror post;
- a pendulum electrode coupled to the second side of the hinge;
- and
- a pair of control electrodes configured to selectably apply an electrostatic force between electrodes of the pair of control electrodes and the pendulum electrode to thereby rotate the mirror.
An optical system, comprising:
- a light source configured to generate a light beam;
- and
- a microelectromechanical systems (MEMS) device optically coupled to the light source, the MEMS device comprising:
- a mirror configured to reflect the light beam;
- a mirror post having a first end and a second end, the first end coupled to the mirror;
- a hinge having a first side and a second side, the first side of the hinge coupled to the second end of the mirror post;
- a pendulum electrode coupled to the second side of the hinge;
- and
- a pair of control electrodes spaced from the pendulum electrode.
Dependencies are inferred from the claim text.