Method of using solid carbon dioxide to rough surface
AssigneeNanya Technology Corporation
InventorBo Wei LIU
Life of this patent
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Abstract
The present disclosure provides a method of using solid carbon dioxide to roughen a surface. The method includes the following operations. Solid carbon dioxide is generated. Generating the solid carbon dioxide includes directing carbon dioxide from a gas cylinder to pass through a cooled nozzle to enter a vacuum chamber, in which the solid carbon dioxide is formed after the carbon dioxide passes through the cooled nozzle, and a velocity of the solid carbon dioxide exiting from the cooled nozzle is from 1000 m/s to 3000 m/s. The cooled nozzle is moved continuously and substantially horizontally above a surface of a substrate in the vacuum chamber to bump the surface of the substrate with the solid carbon dioxide to form a rough surface of the substrate.
Claims16
A method of using solid carbon dioxide to roughen a surface, comprising:
- generating solid carbon dioxide, comprising directing carbon dioxide from a gas cylinder to pass through a cooled nozzle to enter a vacuum chamber, in which the solid carbon dioxide is formed after the carbon dioxide passes through the cooled nozzle, and a velocity of the solid carbon dioxide exiting from the cooled nozzle is from 1000 m/s to 3000 m/s;
- and
- continuously and substantially horizontally moving the cooled nozzle above a surface of a substrate in the vacuum chamber to bump the surface of the substrate with the solid carbon dioxide to form a rough surface of the substrate.
A method of using solid carbon dioxide to roughen a surface, comprising:
- generating solid carbon dioxide, comprising directing carbon dioxide from a gas cylinder to pass through cooled nozzles to enter a vacuum chamber, in which the solid carbon dioxide is formed after the carbon dioxide passes through the cooled nozzles, and a velocity of the solid carbon dioxide exiting from the cooled nozzles is from 1000 m/s to 3000 m/s;
- and
- bumping a surface of a substrate in the vacuum chamber with the solid carbon dioxide generated from the cooled nozzles to form a rough surface of the substrate.
Dependencies are inferred from the claim text.