Pad surface regeneration and metal recovery
AssigneeChempower Corporation
InventorsSudhanshu Misra, Suryadevara Babu
Life of this patent
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Abstract
A method comprises planarizing a substrate material with a functionalized chemical planarization pad. The functionalized chemical planarization pad includes a plurality of functional groups bonded to a material of the pad. The functional groups are configured to chemically react with the substrate material such that a portion of substrate material bonds to the functional groups. The pad is regenerated by applying a regeneration solution configured to break bonds between the functional groups and substrate material bonded to the functional groups to form removed material. The removed material is complexed in a dissolved complexing agent to form dissolved material in an effluent phase.
Claims20
A method for using a functionalized chemical planarization pad in planarization processes, the method comprising:
- planarizing a substrate material with the functionalized chemical planarization pad, the functionalized chemical planarization pad including a plurality of functional groups bonded to a material of the functionalized chemical planarization pad, the functional groups being configured to chemically react with the substrate material such that a portion of substrate material bonds to the functional groups;
- regenerating the functionalized chemical planarization pad by applying a regeneration solution comprising a stripping agent, the stripping agent configured to break bonds between the functional groups and substrate material bonded to the functional groups to form removed material;
- and
- complexing the removed material in a dissolved complexing agent to form dissolved material in an effluent phase,
- wherein the stripping agent and the dissolved complexing agent are different materials, and wherein the dissolved complexing agent is provided in the regeneration solution contemporaneously with the stripping agent.
A method for using a functionalized chemical planarization pad and recovery of metal species in planarization processes, the method comprising:
- planarizing a substrate material with a functionalized chemical planarization pad including a plurality of functional groups covalently bonded to a material of the functionalized chemical planarization pad, the functional groups being configured to chemically react with the substrate material such that a portion of substrate material bonds to the functional groups;
- regenerating the functionalized chemical planarization pad by applying a regeneration solution configured to break bonds between the functional groups and substrate material bonded to the functional groups to form removed material, wherein the regeneration solution comprises a dissolved complexing agent, and wherein the dissolved complexing agent comprises at least a chelating agent;
- complexing the removed material in the dissolved complexing agent to form dissolved material in an effluent phase;
- and
- recovering the dissolved material from the effluent phase.
Dependencies are inferred from the claim text.