Processing apparatus, and manufacturing method of movable body

A processing method comprising:

• irradiating a surface of an object with a processing light by using an irradiation optical system of a light irradiation apparatus;
• changing an irradiation position of the processing light from the irradiation optical system on the surface of the object by using a deflection optical system of a first position change apparatus;
• changing a position of the light irradiation apparatus by using a second position change apparatus;
• supporting the light irradiation apparatus by using a support member;
• and
• moving the support apparatus by using a third position change apparatus, wherein
• a position change direction of the light irradiation apparatus by the second position change apparatus is the same as a position change direction of the support apparatus by the third position change apparatus.

A processing method comprising:

• irradiating a surface of an object with a processing light by using an irradiation optical system of a light irradiation apparatus;
• changing an irradiation position of the processing light from the irradiation optical system on the surface of the object by using a deflection optical system of a first position change apparatus;
• changing a position of the light irradiation apparatus by using a second position change apparatus;
• moving the irradiation position of the processing light in a first area on the surface of the object by using the first position change apparatus;
• changing a positional relationship between the object and the light irradiation apparatus by using the second position change apparatus, and moving the irradiation position of the processing light in a second area, which is different from the second area, on the surface of the object after processing the first area;
• and
• processing the second area by irradiating the surface with the processing light after changing the positional relationship, wherein
• a movement of the irradiation position by the first position change apparatus and a movement of the light irradiation apparatus by the second position change apparatus are not performed at the same time.