Showerhead and nozzle structure, and method of controlling and calibrating showerhead and nozzle structure

A method, comprising:

• measuring a respective flowrate of a plurality of flowrates through each respective nozzle structure of a plurality of nozzle structures that are removably coupled to a head body of a showerhead, each respective nozzle structure of the plurality of nozzle structures is in fluid communication with a respective fluid opening of a plurality of fluid openings in the head body of the showerhead;
• comparing the plurality of flowrates to wafer pre-layer information stored in a database;
• and
• tuning the showerhead responsive to determining, based on the comparison, that at least one of the plurality of flowrates are out of tolerance with respect to the wafer pre-layer information stored in the database.

A system, comprising:

• a showerhead including:
• a head body including a plurality of fluid openings;
• a plurality of nozzle structures coupled to the head body, each respective nozzle structure of the plurality of nozzle structures being in fluid communication with a corresponding fluid opening of the plurality of fluid openings, each respective nozzle structure of the plurality of nozzle structures are configured to, in operation, be removable and replaceable relative to the head body, each respective nozzle structure of the plurality of nozzle structures including:
• a nozzle body including a first end and a second end opposite to the first end;
• a fluid channel extending through the nozzle body from the first end to the second end;
• and
• a flowrate monitoring structure embedded within the nozzle body;
• a pedestal configured to, in operation, be moved from a lowered position and a raised position, the pedestal being in relatively closer proximity to the shower head when in the raised position;
• and
• a workpiece on the pedestal, wherein:
• when the pedestal is in the raised position and the showerhead is activated, a layer of material is formed on a surface of the workpiece.