Organic vapor jet printing system
AssigneeUniversal Display Corporation
InventorsGregory McGraw, William E. Quinn, Gregg Kottas, Matthew King, Benjamin Swedlove, Tomasz Trojacki
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Abstract
Devices for deposition of material via organic vapor jet printing (OVJP) and similar techniques are provided. The depositor includes delivery channels ending in delivery apertures, where the delivery channels are flared as they approach the delivery apertures, and/or have a trapezoidal shape. The depositors are suitable for fabricating OLEDs and OLED components and similar devices.
Claims20
A device for deposition of a material onto a substrate, the device comprising:
- a nozzle block comprising a first depositor comprising:
- a leading first rank comprising:
- a leading first exhaust aperture;
- a leading second exhaust aperture;
- and
- a leading first delivery aperture disposed between a portion of the leading first exhaust aperture and the leading second exhaust aperture;
- a trailing second rank comprising:
- a trailing first exhaust aperture;
- a trailing second exhaust aperture;
- and
- a trailing second delivery aperture disposed between a portion of the trailing first exhaust aperture and the trailing second exhaust aperture;
- wherein a trailing edge of the leading first delivery aperture is separated from a leading edge of the trailing second delivery aperture by a portion of the nozzle block in a first direction, wherein the first direction is from the leading first rank to the trailing second rank;
- and
- wherein the leading first delivery aperture is offset from the trailing second delivery aperture by a portion of the nozzle block in a second direction, wherein the second direction is perpendicular to the first direction.
The device of claim 16, wherein a side wall of the first portion of the first delivery channel forms an angle of 30-60° with the surface of the nozzle block.
The device of claim 12, wherein each portion of the leading first exhaust aperture and the leading second exhaust aperture is rectangular, and the longest edge of each portion of the leading first exhaust aperture and the leading second exhaust aperture is arranged along a direction of relative movement of the device and the substrate when the device is in operation.
Dependencies are inferred from the claim text.