Light Source Apparatus

Abstract

According to an embodiment of the present technology, there is provided a light source apparatus that converts a liquid raw material into plasma and extracts radiation by using irradiation with an energy beam, the light source apparatus including: a first member that includes a first region to which the liquid raw material has adhered with a first film thickness; and a beam source that irradiates the first region with the energy beam at a first focusing density and irradiates a first space with the energy beam at a second focusing density, the first space being a space in which the liquid raw material is diffused by the irradiation with the energy beam at the first focusing density, the first focusing density being a focusing density at which the energy beam does not reach the first member when the first region is irradiated with the energy beam.

Dependencies are inferred from the claim text.