US 2026/0058639 A1 · CAPACITIVELY TRANSDUCED MICRO OR NANO ELECTROMECHANICAL RESONATOR SYSTEM AS SIGNAL AMPLIFIER

Abstract

The present disclosure relates to methods and system that provides techniques of designing amplifiers with controllable gain for electrical signals/power based on capacitively transduced Micro and/or Nano electromechanical resonators. The present disclosure provides techniques of implementing an RF voltage amplifier, a phase shift amplifier, and/or an RF power amplifier through capacitively transduced Micro/Nano electromechanical resonators. In some embodiments, the amplifier is narrow-band with the centre frequency specified by the resonant frequency of the Micro/Nano electromechanical resonators. In addition, the present disclosure provides a technique by which a set of capacitively transduced Micro/Nano electromechanical resonators are implemented as RF power amplifier with multiple inputs and multiple outputs with the output voltage being measured at electrically floating electrodes that are capacitively coupled with the resonator. These electrically-floating electrodes can also be used to sum various output signals from a resonator and signals output from various resonators.

Claims21

Dependent claims

A capacitively transduced Micro or Nano Electro Mechanical Resonator system, comprising:

one or more actuating units configured to generate one or more actuating signals based on one or more input signals;
one or more resonance units coupled to the one or more actuating units, wherein each of the one or more of resonance units is configured to resonate in response to the one or more actuating signals based on a value of capacitance associated with each of the respective one or more of resonance units;
a sensing unit capacitively coupled to the one or more resonance units, the sensing unit configured to, in response to one or more of generation of the one or more actuating signals and resonation of the one or more of resonance units, sense one or more capacitance component, associated with the sensing unit;
and
an adaptive tuning unit coupled to the sensing unit, the adaptive tuning unit configured to:
generate a tuning signal to tune, based on at least one of the one or more capacitance component and the resonation of the one or more of resonance units, respective resonant frequency of each of the one or more of resonance units;
and
selectively generate, based on the tuning, one or more amplified output signals.

5 more elements

A method comprising:

generating, by one or more actuating units, one or more actuating signals based on one or more input signals;
resonating each of one or more of resonance units coupled to the one or more actuating units, in response to the one or more actuating signals based on a value of capacitance associated with each of the one or more of resonance units;
sensing, by the sensing unit capacitively coupled to the one or more resonance units and in response to one or more of generation of the one or more actuating signals and resonation of the one or more of resonance units, one or more capacitance component, associated with the sensing unit;
generating, by an adaptive tuning unit coupled to the sensing unit, a tuning signal to tune, based on at least one of the one or more capacitance component and the resonation of the one or more of resonance units, respective resonant frequency of each of the one or more of resonance units;
and
selectively generating, by the adaptive tuning unit coupled to the sensing unit, based on the tuning, one or more amplified output signals.

3 more elements

Dependencies are inferred from the claim text.

Capacitively transduced micro or nano electromechanical resonator system as signal amplifier

Life of this patent

Capacitively transduced micro or nano electromechanical resonator system as signal amplifier

Life of this patent

Abstract

Claims21