Odd over-moded bulk acoustic wave devices
AssigneeSkyworks Global Pte. Ltd.
InventorsBenjamin Paul Abbott, Alexandre Augusto Shirakawa, David Albert Feld, Kwang Jae Shin
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Abstract
Aspects and embodiments disclosed herein include a bulk acoustic wave (BAW) device comprising a first electrode, a second electrode, a stack of at least two first piezoelectric material layers of the same polarity type sandwiched between the first electrode and the second electrode, and a first interposer sandwiched between the at least two first piezoelectric material layers and including at least one intermediate electrode, the BAW device being configured to excite an even overtone mode as the main mode of operation.
Claims20
A bulk acoustic wave (BAW) device comprising:
- a first electrode;
- a second electrode;
- a stack of at least two first piezoelectric material layers of a same polarity type sandwiched between the first electrode and the second electrode;
- and
- a first interposer sandwiched between the at least two first piezoelectric material layers and including at least one intermediate electrode, the BAW device being configured to excite an even overtone mode as a main mode of operation.
A film bulk acoustic wave resonator device comprising:
- a substrate;
- first and second conductive layers implemented over the substrate;
- a stack of at least two first piezoelectric material layers of a same polarity type sandwiched between the first conductive layer and the second conductive layer;
- and
- a first interposer sandwiched between the at least two first piezoelectric material layers and having at least one intermediate conductive layer, the film bulk acoustic wave resonator device being configured to excite an even overtone mode as a main mode of operation.
A packaged module comprising:
- a packaging substrate;
- an acoustic wave filter on the packaging substrate and configured to filter a radio frequency signal, the acoustic wave filter including a bulk acoustic wave (BAW) device, the BAW device including a first electrode, a second electrode, a stack of at least two first piezoelectric material layers of a same polarity type sandwiched between the first electrode and the second electrode, and a first interposer sandwiched between the at least two first piezoelectric material layers and including at least one intermediate electrode, the BAW device being configured to excite an even overtone mode as a main mode of operation;
- and
- a radio frequency component electrically coupled to the acoustic wave filter and positioned on the packaging substrate, the acoustic wave filter and the radio frequency component being enclosed within a common package.
Dependencies are inferred from the claim text.