Charged particle beam device and control method thereof
AssigneeHitachi High-Tech Corporation
InventorsDaisuke BIZEN, Yuzuru Mizuhara, Shu Kizawa
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Abstract
A charged particle beam device includes: a charged particle source configured to emit a charged particle beam to be emitted onto a sample; a deflector configured to deflect trajectories of a secondary electron and a reflected electron emitted from the sample; a reflected electron detector configured to detect the reflected electron; a control unit configured to acquire an observation image based on a detection signal output from the reflected electron detector and configured to control an operation of each unit; and an absorbing plate disposed between the deflector and the reflected electron detector and including a concave portion.
Claims12
A charged particle beam device comprising:
- a charged particle source configured to emit a charged particle beam to be emitted onto a sample;
- a deflector configured to deflect trajectories of a secondary electron and a reflected electron emitted from the sample;
- a reflected electron detector configured to detect the reflected electron;
- a control unit configured to acquire an observation image based on a detection signal output from the reflected electron detector and configured to control an operation of each unit;
- and
- an absorbing plate disposed between the deflector and the reflected electron detector and including a concave portion.
A control method for a charged particle beam device including a charged particle source configured to emit a charged particle beam to be emitted onto a sample, a deflector configured to deflect trajectories of a secondary electron and a reflected electron emitted from the sample, a reflected electron detector configured to detect the reflected electron, a second reflected electron detector provided at an azimuth different from an azimuth of the reflected electron detector and configured to detect the reflected electron, a filter disposed between the deflector and the second reflected electron detector and configured to block the secondary electron, and a control unit configured to acquire an observation image based on a detection signal output from the reflected electron detector or the second reflected electron detector and configured to control an operation of each unit, the control method comprising:
- controlling, by the control unit, the deflector according to an energy difference between the reflected electron and the secondary electron.
Dependencies are inferred from the claim text.