Wolter mirror assembly
AssigneeKLA Corporation
InventorsJoseph Walsh, Amanjot Gill, Yue Wang, Shuqi Zheng, Junwon Lee
Life of this patent
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Abstract
A mirror assembly is disclosed. The mirror assembly includes an ellipsoid optical surface. The mirror assembly includes a hyperboloid optical surface, wherein the ellipsoid optical surface and the hyperboloid optical surface are arranged in a Wolter mirror configuration. The mirror assembly includes a substrate. The substrate includes a first portion, wherein the ellipsoid optical surface is located on the first portion of the substrate. The substrate includes a second portion, wherein the hyperboloid optical surface is located on the second portion of the substrate, wherein the first portion and the second portion form a monolithic body.
Claims27
A mirror assembly comprising:
- an ellipsoid optical surface;
- a hyperboloid optical surface, wherein the ellipsoid optical surface and the hyperboloid optical surface are arranged in a Wolter mirror configuration;
- and
- a substrate, wherein the substrate comprises;
- a first portion, wherein the ellipsoid optical surface is located on the first portion of the substrate;
- and
- a second portion, wherein the hyperboloid optical surface is located on the second portion of the substrate, wherein the first portion and the second portion form a monolithic body.
An extreme ultraviolet inspection system comprising:
- an extreme ultraviolet illumination source, wherein the extreme ultraviolet illumination source is configured to generate an extreme ultraviolet beam;
- one or more illumination optics, wherein the one or more illumination optics includes one or more mirror assemblies, wherein the one or more mirror assemblies are configured to direct the extreme ultraviolet beam to a sample, wherein each of the one or more mirror assemblies comprises:
- an ellipsoid optical surface;
- a hyperboloid optical surface, wherein the ellipsoid optical surface and the hyperboloid optical surface are arranged in a Wolter mirror configuration;
- and
- a substrate, wherein the substrate comprises;
- a first portion, wherein the ellipsoid optical surface is located on the first portion of the substrate;
- and
- a second portion, wherein the hyperboloid optical surface is located on the second portion of the substrate, wherein the first portion and the second portion form a monolithic body;
- one or more detectors;
- and
- one or more collection optics, wherein the one or more collection optics are configured to direct a reflected extreme ultraviolet beam that has been reflected by the sample.
A method comprising:
- generating, with an extreme ultraviolet illumination source, an extreme ultraviolet beam;
- directing, with one or more mirror assemblies, the extreme ultraviolet beam to a sample, wherein each of the one or more mirror assemblies comprises:
- an ellipsoid optical surface;
- a hyperboloid optical surface, wherein the ellipsoid optical surface and the hyperboloid optical surface are arranged in a Wolter mirror configuration;
- and
- a substrate, wherein the substrate comprises;
- a first portion, wherein the ellipsoid optical surface is located on the first portion of the substrate;
- and
- a second portion, wherein the hyperboloid optical surface is located on the second portion of the substrate, wherein the first portion and the second portion form a monolithic body;
- directing, with one or more collection optics, reflected extreme ultraviolet light from the sample to one or more detectors;
- and
- generating one or more measurements based on the reflected extreme ultraviolet light.
Dependencies are inferred from the claim text.