Preparation method and structure of microlenses at waveguide side
AssigneeFoci Fiber Optic Communications, Inc.
InventorsTing-Ta Hu, Po-Yi Wu, Chieh-Yu Fang, Ting-Yan Lin
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Abstract
The present invention relates to a preparation method and structure of multi-layer stacked waveguide. The method involves providing an optical waveguide block; forming an optical lens groove in the optical waveguide block; forming an anti-reflection layer to cover the optical waveguide block and the optical lens groove; forming an optical lens material above the optical waveguide block and filling the optical lens groove; removing portions of the anti-reflective layer and the optical lens material to define a preliminary microlens structure; and performing a reflow process on the preliminary microlens structure to form a microlens.
Claims11
A preparation method of microlenses at waveguide side, comprising the steps of:
- providing an optical waveguide block;
- forming an optical lens groove in the optical waveguide block;
- forming an anti-reflection layer to cover the optical waveguide block and the optical lens groove;
- forming an optical lens material above the optical waveguide block and filling the optical lens groove;
- removing the anti-reflective layer and the optical lens material outside the one side of the optical lens groove and above the optical waveguide block and adjacent to the side of the optical lens groove to define a microlens preliminary structure;
- and
- performing a reflow process on the microlens preliminary structure to form a microlens.
Dependencies are inferred from the claim text.