Pressure sensor
AssigneeMurata Manufacturing Co., Ltd.
InventorsTakahiro ASADA, Yoshihiro YOSHIDA, Takeshi NAKANISHI
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AssigneeMurata Manufacturing Co., Ltd.
InventorsTakahiro ASADA, Yoshihiro YOSHIDA, Takeshi NAKANISHI
Estimating the term…
A pressure sensor that includes a substrate; a detection element on a surface of the substrate; and a covering member on the surface of the substrate and covering a portion of the detection element. The covering member includes: a main body on the upper surface of the substrate, a protruding part protruding from a surface of the main body in a direction away from the substrate, and a recessed part recessed from a surface of the protruding part along an up-down direction and exposing the detection element. The recessed part has a taper shape in which an opening face becomes smaller in a direction from the surface of the protruding part toward the detection element. In a section, an inner wall surface of the recessed part is recessed outward from an imaginary straight line connecting an upper end portion and a lower end portion of the inner wall surface.
A pressure sensor comprising:
A pressure sensor comprising:
Dependencies are inferred from the claim text.