Fiber Optic Temperature Sensor System

A temperature sensor system, comprising:

• at least one sensing element configured to be in thermal communication with at least a portion of a structural element of a semiconductor processing chamber, wherein the at least one sensing element is configured to emit at least one return beam in response to a source beam;
• a controller including a converter having at least one light source configured to emit at least one source beam and at least one first detector configured to detect at least a portion of the at least one return beam;
• at least one optical pathway having a first end and a second end opposite the first end, wherein the first end is spaced apart from the at least one sensing element and where the optical pathway is configured to conduct at least a portion of the at least one source beam from the converter to the at least one sensing element and to conduct at least a portion of the at least one return beam from the at least one sensing element to the at least one first detector;
• and
• at least one boundary at least partially disposed between the first end of the at least one optical pathway and the at least one sensing element, the at least one boundary comprising at least one of a gas, a solid, or a liquid,
• wherein:
• (i) the at least one boundary is at least partially transparent to at least a portion of the at least one source beam and to at least a portion of the at least one return beam;
• and
• (ii) the at least one controller is configured to calculate a temperature of the sensing element in thermal communication based on at least one characteristic of the at least one return beam.