Sealing airlock for deposition chamber
OwnerVincent RUWET, Didier MARNEFFE +1inventors
InventorsVincent RUWET, Didier MARNEFFE, Philippe DOSSIN
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Abstract
A sealing lock for a vacuum deposition facility of a coating on a running metal strip following a running path, including walls and at least three pairs of rolls, inside the walls, wherein each pair of rolls of the at least three pairs of rolls includes a roll with a metal surface and a roll with an elastomer surface layer, having a thickness from 3 to 30 mm, forming a gap from 1 to 11 mm, the rolls with an elastomer surface layer of two successive pairs of rolls are on opposite sides of the running path.
Claims14
1-12. (canceled)
A sealing lock for a vacuum deposition facility of a coating on a running metal strip following a running path, the sealing lock comprising:
- walls;
- and
- at least three pairs of rolls, the at least three pairs of rolls being configured inside the walls,
- wherein each pair of rolls of the at least three pairs of rolls comprise:
- a roll with a metal surface;
- and
- a roll with an elastomer surface layer having a thickness of 3 to 30 mm and forming a gap of 1 to 11 mm with the roll with the metal surface,
- wherein the rolls with the elastomer surface layer of two successive pairs of rolls are on opposite sides of the running path.
Dependencies are inferred from the claim text.