Edge zone coating removal with warpage compensation

An apparatus to remove at least a portion of a coating from a coated surface of a substrate, comprising:

• a nozzle assembly configured to travel in a first direction along a length of the substrate, the nozzle assembly including one or more nozzle-heads, wherein each nozzle-head of the one or more nozzle-heads includes,
• a body having a cavity, the cavity being configured to receive at least a portion of the coated surface of the substrate therein;
• and
• at least one nozzle tip supported on the body and inclined at an obtuse angle with respect to the coated surface of the substrate received in the cavity, wherein the at least one nozzle tip is configured to direct an angled stream of an etchant to impinge on the coated surface of the substrate received in the cavity as the nozzle assembly travels in the first direction along the length of the substrate;
• one or more sensors configured to measure a warpage of the substrate along at least a portion of the length of the substrate;
• and
• a controller configured to move at least one nozzle-head of the one or more nozzle-heads in a second direction orthogonal to the first direction based on the measured warpage as the nozzle assembly travels in the first direction with the angled stream of the etchant impinging on the coated surface of the substrate received in the cavity.