Laser Irradiation Apparatus, Information Processing Method, and Recording Medium Recording Program to be Readable
AssigneeJsw Aktina System Co., Ltd.
InventorsKenichi Ohmori, Yuzaburo Ohta, Rei Matsushita
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Abstract
A laser irradiation apparatus is a laser irradiation apparatus including a laser light source, the laser irradiation apparatus including a failure prediction unit configured to perform failure prediction on a movable part used when a substrate is processed by the laser light source, in which the failure prediction unit acquires a physical quantity when the movable part is movable, and derives a failure time of the movable part based on an acquired physical quantity.
Claims9
A laser irradiation apparatus including a laser light source, the apparatus comprising:
- a failure prediction unit configured to perform failure prediction on a movable part used when a substrate is processed by the laser light source,
- wherein the failure prediction unit
- acquires a physical quantity when the movable part is moving, wherein the physical quantity comprises temperature and vibration characteristics of at least a portion of the movable part, and
- derives a failure time of the movable part based on the acquired physical quantity.
An information processing method of causing a computer configured to perform failure prediction on a movable part used when a substrate is processed by a laser light source included in a laser irradiation apparatus to execute processes of:
- (A) acquiring a physical quantity when the movable part is movable;
- and
- (B) deriving a failure time of the movable part based on an acquired physical quantity.
A recording medium recording a program to be readable, the program causing a computer configured to perform failure prediction on a movable part used when a substrate is processed by a laser light source included in a laser irradiation apparatus to execute processes of:
- (A) acquiring a physical quantity when the movable part is movable;
- and
- (B) deriving a failure time of the movable part based on an acquired physical quantity.
Dependencies are inferred from the claim text.